54 μ-porous vacuum chucks
1. Clamping with Witte vacuum chucks
Vacuum chucks from Witte have proven successful in many
areas of semiconductor technology and made a name for accurate,
fast and "gentle" clamping.
These lightweight, yet very accurate vacuum chucks are
made of aluminum alloy and usually have a micro-porous
clamping surface of Metapor material.
However, custom-built perforated-grid chucks with small
holes arranged in a specific pattern can also be implemented.
(See pictures)
2. Flexible
Besides standard versions of this vacuum chucks, Witte offers
every conceivable specific design and dimension. We analyze
technical requirements and environmental conditions of customers’
processes, and develop a concept together with them.
Various technically feasible configurations have already been
manufactured.
3. Accurate
A modern machine shop and climatized measuring rooms
with high precision measuring machines ensure excellent
quality of products. Vacuum chucks are available with flatness
and / or parallelism of < 5μm if the application profile of the
customer requires it.
Special version with integrated heating
and electronic temperature control
4. Reliability
A chuck surface comprising of micro-porous material guarantees
completely "flat" clamping. Thin carrier foils or wafers are
not deformed by suction holes, suction grooves or similar
which occurs during conventional clamping methods. The low
weight and accuracy of such Witte chucks is also advantageous
for automated applications.
5. Universal
Another major advantage of micro-porous vacuum chucks is
that the vacuum still works extremely effectively even when
the micro-porous surface is not covered completely. This enables
clamping of different sized parts on the same chuck.
The porous surface may also be divided into separately operable
areas with individual switches. (See example opposite)
Integrated hovercraft technology, ejector and lifting pins are
some of the technical ingredients of these innovative concepts.
Furthermore, vacuum chucks for certain processes can be
"heatable" up to a temperature as high as 150°C with corresponding
temperature controls (see picture above.).
Likewise, cooling systems or light transparency applications
are possible.
6. Everything from one source
In addition to standard and custom vacuum chucks Witte
supplies all necessary accessories such as simple ejectors,
vacuum pumps, rotary joints, hoses, solenoid valves and
much more.
Our expert staff can advise you and look forward to your
inquiry.
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